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  • Microelectromechanical systems.

Microelectromechanical systems. (Topical Term)

Number of records used in: 3
Preferred form: Microelectromechanical systems.

Machine generated authority record.

Work cat.: (OSt)122485: Madou, Marc J. 65557, Fundamentals of microfabrication and nanotechnology /, 2012.

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